MEMS Density sensor to monitor gases and gas mixtures during the process in the smallest of spaces and with minimal quantities of the medium

General Information
Electrical Data
Mechanical Data
Additional Information


  • Type of medium: Gases and Gas-mixtures
  • Measuring range: 0.2 to 19 kg/m³
  • Accuracy: ± 0.1 kg/m³
  • Process pressure range: 0 to 10 bar
  • Process temperature range: -20 to 60 °C
  • Communication protocol: Modbus RTU

Fields of application

  • Gas density, temperature, pressure and concentration measurement
  • Monitoring of welding gas mixtures
  • Monitoring of gas mixtures for food packaging
  • Testing of clean gases


The sensor measures the density of gas directly in the gas line or in the gas tank. At the heart of the sensor is a microelectromechanical system (MEMS) with an oscillator in the form of a tuning fork. For the measurement, the metal housing surrounding the MEMS is filled with the medium. The natural frequency of the oscillator varies depending on the density of the gas surrounding it. In order to compensate for temperature effects, a platinum resistor which precisely measures the local temperature is built into the sensor.


The sensor not only measures density, but also temperature and pressure – for precise monitoring of product quality and as a basis for determining the concentration of binary gas mixtures.


Monitoring of welding gas mixtures: To ensure a reliable weld seam, the gases must be mixed in the correct ratio. Gas density data can be used to monitor the gas mixture.

Monitoring of gas mixtures for food packaging: Density data can be used to monitor the gas mixture for salad or meat packages. This replaces spot checks and reduces losses.

Testing of clean gases: Gas cylinders can get mixed up. Density data shows whether the correct gas cylinder is in use.

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